JPS622032B2 - - Google Patents

Info

Publication number
JPS622032B2
JPS622032B2 JP54157158A JP15715879A JPS622032B2 JP S622032 B2 JPS622032 B2 JP S622032B2 JP 54157158 A JP54157158 A JP 54157158A JP 15715879 A JP15715879 A JP 15715879A JP S622032 B2 JPS622032 B2 JP S622032B2
Authority
JP
Japan
Prior art keywords
magnetic field
evaporation
discharge
source
metal vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54157158A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5681671A (en
Inventor
Hiroshi Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15715879A priority Critical patent/JPS5681671A/ja
Publication of JPS5681671A publication Critical patent/JPS5681671A/ja
Publication of JPS622032B2 publication Critical patent/JPS622032B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP15715879A 1979-12-04 1979-12-04 Ion plating apparatus Granted JPS5681671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15715879A JPS5681671A (en) 1979-12-04 1979-12-04 Ion plating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15715879A JPS5681671A (en) 1979-12-04 1979-12-04 Ion plating apparatus

Publications (2)

Publication Number Publication Date
JPS5681671A JPS5681671A (en) 1981-07-03
JPS622032B2 true JPS622032B2 (en]) 1987-01-17

Family

ID=15643444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15715879A Granted JPS5681671A (en) 1979-12-04 1979-12-04 Ion plating apparatus

Country Status (1)

Country Link
JP (1) JPS5681671A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6009220B2 (ja) * 2012-05-21 2016-10-19 住友重機械工業株式会社 成膜装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123376B2 (en]) * 1972-10-17 1976-07-16
JPS4990685A (en]) * 1972-12-29 1974-08-29
JPS5232759B2 (en]) * 1973-08-07 1977-08-23
JPS5258081A (en) * 1975-11-10 1977-05-13 Hitachi Ltd Apparatus for attaching thin film

Also Published As

Publication number Publication date
JPS5681671A (en) 1981-07-03

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